This text on optics for graduate students explains how to determine
material properties and parameters for inaccessible substrates and
unknown films as well as how to measure extremely thin films. Its
14 case studies illustrate concepts and reinforce applications of
ellipsometry -- particularly in relation to the semiconductor
industry and to studies involving corrosion and oxide growth.
"A User's Guide to Ellipsometry" will enable readers to move beyond
limited turn-key applications of ellipsometers. In addition to its
comprehensive discussions of the measurement of film thickness and
optical constants in film, it also considers the trajectories of
the ellipsometric parameters Del and Psi and how changes in
materials affect parameters. This volume also addresses the use of
polysilicon, a material commonly employed in the microelectronics
industry, and the effects of substrate roughness. Three appendices
provide helpful references.
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