Providing a clear theoretical understanding of MEMS and NEMS,
Solid-State Physics, Fluidics, and Analytical Techniques in Micro-
and Nanotechnology focuses on nanotechnology and the science behind
it, including solid-state physics. It provides a clear
understanding of the electronic, mechanical, and optical properties
of solids relied on in integrated circuits (ICs), MEMS, and NEMS.
After exploring the rise of Si, MEMS, and NEMS in a historical
context, the text discusses crystallography, quantum mechanics, the
band theory of solids, and the silicon single crystal. It concludes
with coverage of photonics, the quantum hall effect, and
superconductivity. Fully illustrated in color, the text offers
end-of-chapter problems, worked examples, extensive references, and
a comprehensive glossary of terms. Topics include: Crystallography
and the crystalline materials used in many semiconductor devices
Quantum mechanics, the band theory of solids, and the relevance of
quantum mechanics in the context of ICs and NEMS Single crystal Si
properties that conspire to make Si so important Optical properties
of bulk 3D metals, insulators, and semiconductors Effects of
electron and photon confinement in lower dimensional structures How
evanescent fields on metal surfaces enable the guiding of light
below the diffraction limit in plasmonics Metamaterials and how
they could make for perfect lenses, changing the photonic field
forever Fluidic propulsion mechanisms and the influence of
miniaturization on fluid behavior Electromechanical and optical
analytical processes in miniaturized components and systems The
first volume in Fundamentals of Microfabrication and
Nanotechnology, Third Edition, Three-Volume Set, the book presents
the electronic, mechanical, and optical properties of solids that
are used in integrated circuits, MEMS, and NEMS and covers quantum
mechanics, electrochemistry, fluidics, and photonics. It lays the
foundation for a qualitative and quantitative theoretical
understanding of MEMS and NEMS.
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