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Focused Ion Beam Systems - Basics and Applications (Hardcover)
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Focused Ion Beam Systems - Basics and Applications (Hardcover)
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The focused ion beam (FIB) system is an important tool for
understanding and manipulating the structure of materials at the
nanoscale. Combining this system with an electron beam creates a
DualBeam - a single system that can function as an imaging,
analytical and sample modification tool. Presenting the principles,
capabilities, challenges and applications of the FIB technique,
this edited volume, first published in 2007, comprehensively covers
the ion beam technology including the DualBeam. The basic
principles of ion beam and two-beam systems, their interaction with
materials, etching and deposition are all covered, as well as in
situ materials characterization, sample preparation,
three-dimensional reconstruction and applications in biomaterials
and nanotechnology. With nanostructured materials becoming
increasingly important in micromechanical, electronic and magnetic
devices, this self-contained review of the range of ion beam
methods, their advantages, and when best to implement them is a
valuable resource for researchers in materials science, electrical
engineering and nanotechnology.
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