Presenting unified coverage of the design and modeling of smart
micro- and macrosystems, this book addresses fabrication issues and
outlines the challenges faced by engineers working with smart
sensors in a variety of applications.
Part I deals with the fundamental concepts of a typical smart
system and its constituent components. Preliminary fabrication and
characterization concepts are introduced before design principles
are discussed in detail. Part III presents a comprehensive account
of the modeling of smart systems, smart sensors and actuators. Part
IV builds upon the fundamental concepts to analyze fabrication
techniques for silicon-based MEMS in more detail.
Practicing engineers will benefit from the detailed assessment
of applications in communications technology, aerospace, biomedical
and mechanical engineering. The book provides an essential
reference or textbook for graduates following a course in smart
sensors, actuators and systems.
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