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MEMS (microelectromechanical systems) technology makes possible the
production of miniature devices and systems that stand to
revolutionize industrial, optical, medical and electronic markets.
Thousands of practitioners and students have gained a solid
understanding of MEMS with the best-selling first edition of this
book. Now in its second edition, An Introduction to
Microelectromechanical Systems Engineering brings readers to
up-to-date with the latest developments in this cutting-edge area.
Featuring brand new coverage of today's hottest topics, such as RF
MEMS and photonic MEMS, this thoroughly revised resource shows
engineers, technical managers, and executives how their projects
may benefit from a MEMS solution.
Here's the first non-technical introduction to the exciting field
of microelectromechanical systems (MEMS). It describes in detail
the materials used in producing MEMS -- including silicon, polymers
and glass and quartz substrates -- as well as MEMS design for
nozzles, sensors, valves and other applications. It examines the
manufacture of commercial MEMS using techniques such as oxidation,
lithography, chemical vapor deposition and silicon fusion bonding
and applications in a wide range of industries including data
storage, telecommunications, consumer, automotive, medical and
defense. A unique element of this book is its look at the future of
MEMS -- its potential for microelectrode arrays, actuators and
optical switches and other technologies.
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