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It is clear that concern for the preservation of the environment is
growing. The IC industry is reputed to be a clean one, and the
introduction of electronic systems has played a pivotal role in
developing technologies that help to protect the environment.
However, it must also be realized that the electronic industry
consumes huge amounts of energy, chemicals, technical gases and
even water. This book provides an overview of the available
scientific information on environmentally benign IC production. A
broad range of topics is addressed including work on resource
reduction for chemicals, gases and DI water, reuse or recycling of
chemicals, waste treatment strategies, environmentally friendly
alternative technologies and analytical technologies for
environmental studies. Undoubtedly, environmental concerns are
leading to drastic changes in state-of-the-art processing, and new
technologies are emerging from the strive towards lowering the
environmental impact of the IC industry.
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