Micro/nano-scale engineering-especially the design and implementation of ultra-fast and ultra-scale energy devices, sensors, and cellular and molecular systems-remains a daunting challenge. Modeling and control has played an essential role in many technological breakthroughs throughout the course of history. Therefore, the need for a practical guide to modeling and control for micro/nano-scale devices and systems has emerged. The first edited volume to address this rapidly growing field, Modeling and Control for Micro/Nano Devices and Systems gives control engineers, lab managers, high-tech researchers, and graduate students easy access to the expert contributors' cutting-edge knowledge of micro/nanotechnology, energy, and bio-systems. The editors offer an integrated view from theory to practice, covering diverse topics ranging from micro/nano-scale sensors to energy devices and control of biology systems in cellular and molecular levels. The book also features numerous case studies for modeling of micro/nano devices and systems, and explains how the models can be used for control and optimization purposes. Readers benefit from learning the latest modeling techniques for micro/nano-scale devices and systems, and then applying those techniques to their own research and development efforts.