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This book covers modern analog components, their characteristics,
and interactions with process parameters. It serves as a
comprehensive guide, addressing both the theoretical and practical
aspects of modern silicon devices and the relationship between
their electrical properties and processing conditions. Based on the
authors' extensive experience in the development of analog devices,
this book is intended for engineers and scientists in semiconductor
research, development and manufacturing. The problems at the end of
each chapter and the numerous charts, figures and tables also make
it appropriate for use as a text in graduate and advanced
undergraduate courses in electrical engineering and materials
science.
The drive toward new semiconductor technologies is intricately
related to market demands for cheaper, smaller, faster, and more
reliable circuits with lower power consumption. The development of
new processing tools and technologies is aimed at optimizing one or
more of these requirements. This goal can, however, only be
achieved by a concerted effort between scientists, engineers,
technicians, and operators in research, development, and manufac
turing. It is therefore important that experts in specific
disciplines, such as device and circuit design, understand the
principle, capabil ities, and limitations of tools and processing
technologies. It is also important that those working on specific
unit processes, such as lithography or hot processes, be familiar
with other unit processes used to manufacture the product. Several
excellent books have been published on the subject of process
technologies. These texts, however, cover subjects in too much
detail, or do not cover topics important to modem tech nologies.
This book is written with the need for a "bridge" between different
disciplines in mind. It is intended to present to engineers and
scientists those parts of modem processing technologies that are of
greatest importance to the design and manufacture of semi conductor
circuits. The material is presented with sufficient detail to
understand and analyze interactions between processing and other
semiconductor disciplines, such as design of devices and cir cuits,
their electrical parameters, reliability, and yield."
The drive toward new semiconductor technologies is intricately
related to market demands for cheaper, smaller, faster and more
reliable circuits with lower power consumption. The development of
new processing tools and technologies aims at optimizing one or
more of these requirements. This goal, however, can only be
achieved by a concerted effort between scientists, engineers,
technicians, and operators in research, development, and
manufacturing. It is thus important that experts in specific
disciplines, such as device and circuit design, understand the
principle, capabilities, and limitations of tools and processing
technologies. It is also important that those working on specific
unit processes, such as lithography or hot processes, be familiar
with other unit processes used to manufacture the product.
Fundamentals of Semiconductor Processing Technologies is written to
bridge different disciplines. It presents to engineers and
scientists those parts of modern processing technologies that are
of greatest importance to the design and manufacture of
semiconductor circuits. The material is presented with sufficient
detail to understand and analyze interactions between processing
and other semiconductor disciplines, such as design of devices and
circuits, their electrical parameters, reliability, and yield.
Fundamentals of Semiconductor Processing Technologies serves as a
base on which to build an understanding of the manufacture of
semiconductor products. It is written in a form to satisfy the
needs of engineers and scientists in semiconductor research,
development and manufacturing, and to be conveniently used for a
one-semester graduate-level course in semiconductor engineering
ormaterials science curriculum.
This book covers modern analog components, their characteristics,
and interactions with process parameters. It serves as a
comprehensive guide, addressing both the theoretical and practical
aspects of modern silicon devices and the relationship between
their electrical properties and processing conditions. Based on the
authors' extensive experience in the development of analog devices,
this book is intended for engineers and scientists in semiconductor
research, development and manufacturing. The problems at the end of
each chapter and the numerous charts, figures and tables also make
it appropriate for use as a text in graduate and advanced
undergraduate courses in electrical engineering and materials
science. Enables engineers to understand analog device physics, and
discusses important relations between process integration, device
design, component characteristics, and reliability; Describes in
step-by-step fashion the components that are used in analog
designs, the particular characteristics of analog components, while
comparing them to digital applications; Explains the second-order
effects in analog devices, and trade-offs between these effects
when designing components and developing an integrated process for
their manufacturing.
This book covers modern analog components, their characteristics,
and interactions with process parameters. It serves as a
comprehensive guide, addressing both the theoretical and practical
aspects of modern silicon devices and the relationship between
their electrical properties and processing conditions. Based on the
authors' extensive experience in the development of analog devices,
this book is intended for engineers and scientists in semiconductor
research, development and manufacturing. The problems at the end of
each chapter and the numerous charts, figures and tables also make
it appropriate for use as a text in graduate and advanced
undergraduate courses in electrical engineering and materials
science. Enables engineers to understand analog device physics, and
discusses important relations between process integration, device
design, component characteristics, and reliability; Describes in
step-by-step fashion the components that are used in analog
designs, the particular characteristics of analog components, while
comparing them to digital applications; Explains the second-order
effects in analog devices, and trade-offs between these effects
when designing components and developing an integrated process for
their manufacturing.
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