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Showing 1 - 4 of
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219 8. 2 Sensors 221 8. 3 Physical Sensors 222 8. 3. 1 Electrical
Sensing Means 223 8. 3. 2 Magnetic Field Methods 231 8. 3. 3
Optical Methods 232 8. 4 Chemical Sensors 241 8. 4. 1 Electrical
Gas and Chemical Sensors 243 8. 4. 2 Guided-Optics Intrinsic
Chemical Sensors 246 8. 4. 3 Extrinsic Chemical Sensors 250 8. 4. 4
Polymer Waveguide Chemical Sensors 251 8. 4. 5 Surface Plasmon
Chemical Sensors 252 8. 4. 6 Indicator-Mediated Extrinsic Sensing
253 8. 4. 7 Optical Biosensors 256 8. 4. 8 Ultrasonic Gas and
Chemical Sensors 257 8. 4. 9 Intelligent Sensors 258 8. 5
Connections/Links and Wiring 258 8. 5. 1 Optical Links 260 8. 5. 2
Requirement on the Processing Unit/Intelligence 262 8. 6 Actuators
263 8. 7 Signal Processing/Computing 264 8. 7. 1 Implicit
Computation 266 8. 7. 2 Explicit Computation 267 8. 8 References
274 Subject Index 279 Micro-Actuators (Electrical, Magnetic,
Thermal, Optical, Mechanical, and Chemical) It has become quite
apparent that sensors and actuators are the main bottleneck of the
modem information processing and control systems. Microprocessors
and computers used to be the main limiting element in most
information processing systems. But thanks to the enonnous progress
in the microelectronics industry, most information analysis tasks
can be processed in real time. The data has to be acquired by the
processor in some form and processed and used to produce some
useful function in the real world.
Controlling the mechanical, electrical, magnetic, and optical
properties of materials by advanced fabrication methods (Le. ;
Molecular Beam Epitaxy and Metal-Organic Chemical Vapor Deposition)
has become the new paradigm in our research era. Sensors, being the
most vital part of the electronic data processing and decision
making machines, stand to gain the most from engineering of the
properties of materials. Microfabrication technology has already
contributed significantly to the batch fabrication of micro-sensors
with higher over all qualities compared to their counterparts that
are fabricated using other methods. Batch fabrication of
micro-sensors i) results in more uniform properties of
co-fabricated devices, ii) nearly eliminates the need for
characterization of individual sensors, and iii) eliminates a need
for laborious alignment procedures. A less obvious benefit of using
microfabrication methods is the possibility of precise control over
the dimensions of the sensor. This control enables engineering of
some of the properties of the material which affect the sensor's
operation. There are many examples of this in the literature.
Optical sensors are known to have superior properties over their
counterparts that use other (i. e. ; electrostatic and magnetic)
means of detection. To name a few, these advantages are: i)
immunity to electromagnetic interferences, ii) higher sensitivities
compared to the other types of sensors, iii) simplicity of
operation principles, and iv) simplicity of overall construction.
219 8. 2 Sensors 221 8. 3 Physical Sensors 222 8. 3. 1 Electrical
Sensing Means 223 8. 3. 2 Magnetic Field Methods 231 8. 3. 3
Optical Methods 232 8. 4 Chemical Sensors 241 8. 4. 1 Electrical
Gas and Chemical Sensors 243 8. 4. 2 Guided-Optics Intrinsic
Chemical Sensors 246 8. 4. 3 Extrinsic Chemical Sensors 250 8. 4. 4
Polymer Waveguide Chemical Sensors 251 8. 4. 5 Surface Plasmon
Chemical Sensors 252 8. 4. 6 Indicator-Mediated Extrinsic Sensing
253 8. 4. 7 Optical Biosensors 256 8. 4. 8 Ultrasonic Gas and
Chemical Sensors 257 8. 4. 9 Intelligent Sensors 258 8. 5
Connections/Links and Wiring 258 8. 5. 1 Optical Links 260 8. 5. 2
Requirement on the Processing Unit/Intelligence 262 8. 6 Actuators
263 8. 7 Signal Processing/Computing 264 8. 7. 1 Implicit
Computation 266 8. 7. 2 Explicit Computation 267 8. 8 References
274 Subject Index 279 Micro-Actuators (Electrical, Magnetic,
Thermal, Optical, Mechanical, and Chemical) It has become quite
apparent that sensors and actuators are the main bottleneck of the
modem information processing and control systems. Microprocessors
and computers used to be the main limiting element in most
information processing systems. But thanks to the enonnous progress
in the microelectronics industry, most information analysis tasks
can be processed in real time. The data has to be acquired by the
processor in some form and processed and used to produce some
useful function in the real world.
Controlling the mechanical, electrical, magnetic, and optical
properties of materials by advanced fabrication methods (Le. ;
Molecular Beam Epitaxy and Metal-Organic Chemical Vapor Deposition)
has become the new paradigm in our research era. Sensors, being the
most vital part of the electronic data processing and decision
making machines, stand to gain the most from engineering of the
properties of materials. Microfabrication technology has already
contributed significantly to the batch fabrication of micro-sensors
with higher over all qualities compared to their counterparts that
are fabricated using other methods. Batch fabrication of
micro-sensors i) results in more uniform properties of
co-fabricated devices, ii) nearly eliminates the need for
characterization of individual sensors, and iii) eliminates a need
for laborious alignment procedures. A less obvious benefit of using
microfabrication methods is the possibility of precise control over
the dimensions of the sensor. This control enables engineering of
some of the properties of the material which affect the sensor's
operation. There are many examples of this in the literature.
Optical sensors are known to have superior properties over their
counterparts that use other (i. e. ; electrostatic and magnetic)
means of detection. To name a few, these advantages are: i)
immunity to electromagnetic interferences, ii) higher sensitivities
compared to the other types of sensors, iii) simplicity of
operation principles, and iv) simplicity of overall construction.
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