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Books > Professional & Technical > Electronics & communications engineering > Electronics engineering
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Handbook of Silicon Semiconductor Metrology (Hardcover)
Loot Price: R11,150
Discovery Miles 111 500
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Handbook of Silicon Semiconductor Metrology (Hardcover)
Expected to ship within 10 - 15 working days
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Containing more than 300 equations and nearly 500 drawings,
photographs, and micrographs, this reference surveys key areas such
as optical measurements and in-line calibration methods. It
describes cleanroom-based measurement technology used during the
manufacture of silicon integrated circuits and covers model-based,
critical dimension, overlay, acoustic film thickness, dopant dose,
junction depth, and electrical measurements; particle and defect
detection; and flatness following chemical mechanical polishing.
Providing examples of well-developed metrology capability, the book
focuses on metrology for lithography, transistor, capacitor, and
on-chip interconnect process technologies.
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