Handbook of Silicon Semiconductor Metrology (Hardcover)

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

General

Imprint:	Crc Press
Country of origin:	United States
Release date:	June 2001
First published:	2001
Editors:	Alain C. Diebold
Dimensions:	254 x 178 x 49mm (L x W x T)
Format:	Hardcover
Pages:	896
ISBN-13:	978-0-8247-0506-0
Categories:	Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > General
LSN:	0-8247-0506-8
Barcode:	9780824705060

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