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Handbook of Silicon Semiconductor Metrology (Hardcover) Loot Price: R10,730
Discovery Miles 107 300
Repayment Terms: R1,006 pm x 12*
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Handbook of Silicon Semiconductor Metrology (Hardcover): Alain C. Diebold

Handbook of Silicon Semiconductor Metrology (Hardcover)

Alain C. Diebold

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Loot Price R10,730 Discovery Miles 107 300 | Repayment Terms: R1,006 pm x 12*

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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

General

Imprint: Crc Press
Country of origin: United States
Release date: June 2001
First published: 2001
Editors: Alain C. Diebold
Dimensions: 254 x 178 x 49mm (L x W x T)
Format: Hardcover
Pages: 896
ISBN-13: 978-0-8247-0506-0
Categories: Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > General
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LSN: 0-8247-0506-8
Barcode: 9780824705060

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