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Smart Sensors and MEMS - Intelligent Sensing Devices and Microsystems for Industrial Applications (Paperback, 2nd edition)
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Smart Sensors and MEMS - Intelligent Sensing Devices and Microsystems for Industrial Applications (Paperback, 2nd edition)
Series: Woodhead Publishing Series in Electronic and Optical Materials
Expected to ship within 12 - 17 working days
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Smart Sensors and MEMS: Intelligent Devices and Microsystems for
Industrial Applications, Second Edition highlights new, important
developments in the field, including the latest on magnetic
sensors, temperature sensors and microreaction chambers. The book
outlines the industrial applications for smart sensors, covering
direct interface circuits for sensors, capacitive sensors for
displacement measurement in the sub-nanometer range, integrated
inductive displacement sensors for harsh industrial environments,
advanced silicon radiation detectors in the vacuum ultraviolet
(VUV) and extreme ultraviolet (EUV) spectral range, among other
topics. New sections include discussions on magnetic and
temperature sensors and the industrial applications of smart
micro-electro-mechanical systems (MEMS). The book is an invaluable
reference for academics, materials scientists and electrical
engineers working in the microelectronics, sensors and
micromechanics industry. In addition, engineers looking for
industrial sensing, monitoring and automation solutions will find
this a comprehensive source of information.
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