Silicon carbide (SiC) has been described as a suitable
semiconductor material to use in MEMS and electronic devices for
harsh environments. In recent years, many developments in SiC
technology as bulk growth, materials processing, electronic devices
and sensors have been shown. Moreover, some studies show the
synthesis, characterisation and processing of crystalline SiC
films. However, few works have investigated the potential of
amorphous silicon carbide (a-SiC) thin films for sensors
applications. This book presents fundamentals of amorphous silicon
carbide thin films and their applications in piezoresistive sensors
for high temperature applications.
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