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Amorphous Silicon Carbide Thin Films - Deposition, Characterization, Etching & Piezoresistive Sensors Applications (Paperback, New) Loot Price: R1,215
Discovery Miles 12 150
You Save: R94 (7%)
Amorphous Silicon Carbide Thin Films - Deposition, Characterization, Etching & Piezoresistive Sensors Applications (Paperback,...

Amorphous Silicon Carbide Thin Films - Deposition, Characterization, Etching & Piezoresistive Sensors Applications (Paperback, New)

Mariana Amorim Fraga

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List price R1,309 Loot Price R1,215 Discovery Miles 12 150 | Repayment Terms: R114 pm x 12* You Save R94 (7%)

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Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterisation and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.

General

Imprint: nova science publishers
Country of origin: United States
Release date: 2012
First published: October 2011
Editors: Mariana Amorim Fraga
Dimensions: 155 x 230 x 7mm (L x W x T)
Format: Paperback
Pages: 118
Edition: New
ISBN-13: 978-1-61324-774-7
Categories: Books > Professional & Technical > Mechanical engineering & materials > Materials science > General
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LSN: 1-61324-774-5
Barcode: 9781613247747

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