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MEMS - Design and Fabrication (Hardcover, 2nd)
Loot Price: R4,658
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MEMS - Design and Fabrication (Hardcover, 2nd)
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As our knowledge of microelectromechanical systems (MEMS) continues
to grow, so does The MEMS Handbook. The field has changed so much
that this Second Edition is now available in three volumes.
Individually, each volume provides focused, authoritative treatment
of specific areas of interest. Together, they comprise the most
comprehensive collection of MEMS knowledge available, packaged in
an attractive slipcase and offered at a substantial savings. This
best-selling handbook is now more convenient than ever, and its
coverage is unparalleled. The second volume, MEMS: Design and
Fabrication, details the techniques, technologies, and materials
involved in designing and fabricating MEMS devices. It begins with
an overview of MEMS materials and then examines in detail various
fabrication and manufacturing methods, including LIGA and
macromolding, X-ray based fabrication, EFAB(R) technology, and deep
reactive ion etching. This book includes three new chapters on
polymeric-based sensors and actuators, diagnostic tools, and
molecular self-assembly. It is a thorough guide to the important
aspects of design and fabrication. MEMS: Design and Fabrication
comprises contributions from the foremost experts in their
respective specialties from around the world. Acclaimed author and
expert Mohamed Gad-el-Hak has again raised the bar to set a new
standard for excellence and authority in the fledgling fields of
MEMS and nanotechnology.
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