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MEMS Resonator Filters (Hardcover)
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MEMS Resonator Filters (Hardcover)
Series: Materials, Circuits and Devices
Expected to ship within 10 - 15 working days
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The use of MEMS resonators for signal processing is relatively new
and has the potential to change the topology of newer generation
circuits. New materials, design and fabrication processes, and
integration with conventional circuitry will need to be considered.
This book explores the challenges and opportunities of developing
circuits with MEMS resonator filters. The replacement of classical
electrical components with electromechanical components is explored
in this book, and the specific properties of MEMS resonators
required in various frequency ranges are discussed. Materials and
their selection, CAD tools for system design and the integration of
MEMS with CMOS circuitry, and the design, fabrication, testing and
packaging of MEMS filters themselves are addressed in detail. Case
studies where resonator MEMS have been used as components have been
included to encourage readers to consider the practical
applications of this technology. MEMS Resonator Filters is
essential reading for the analogue circuit designer community,
particularly those who are designing circuits for wireless
communications, and CMOS technology researchers and engineers who
are involved in the fabrication of circuits. Designers of sensors
and interfacing circuits will also be interested since resonators
are also being used as sensors.
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