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Introduction to Microlithography (Hardcover, 2nd Revised edition) Loot Price: R4,844
Discovery Miles 48 440
Repayment Terms: R454 pm x 12*
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Introduction to Microlithography (Hardcover, 2nd Revised edition): Larry F. Thompson, C. Grant Willson, Murrae J. Bowden

Introduction to Microlithography (Hardcover, 2nd Revised edition)

Larry F. Thompson, C. Grant Willson, Murrae J. Bowden

Series: ACS Professional Reference Book

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Loot Price R4,844 Discovery Miles 48 440 | Repayment Terms: R454 pm x 12*

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Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

General

Imprint: American Chemical Society
Country of origin: United States
Series: ACS Professional Reference Book
Release date: 1994
First published: May 1994
Editors: Larry F. Thompson • C. Grant Willson • Murrae J. Bowden
Dimensions: 236 x 158 x 34mm (L x W x T)
Format: Hardcover
Pages: 540
Edition: 2nd Revised edition
ISBN-13: 978-0-8412-2848-1
Categories: Books > Science & Mathematics > Physics > General
Books > Professional & Technical > Industrial chemistry & manufacturing technologies > General
Books > Arts & Architecture > Art forms, treatments & subjects > Prints & printmaking > General
Books > Business & Economics > Business & management > Management of specific areas > Production & quality control management
Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Circuits & components
Books > Arts & Architecture > Art forms, treatments & subjects > Art treatments & subjects > Art techniques & materials > Art techniques & principles
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LSN: 0-8412-2848-5
Barcode: 9780841228481

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