Introduction to Microlithography (Hardcover, 2nd Revised edition)

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

General

Imprint:	American Chemical Society
Country of origin:	United States
Series:	ACS Professional Reference Book
Release date:	1994
First published:	May 1994
Editors:	Larry F. Thompson • C. Grant Willson • Murrae J. Bowden
Dimensions:	236 x 158 x 34mm (L x W x T)
Format:	Hardcover
Pages:	540
Edition:	2nd Revised edition
ISBN-13:	978-0-8412-2848-1
Categories:	Books > Science & Mathematics > Physics > General Books > Professional & Technical > Industrial chemistry & manufacturing technologies > General Books > Arts & Architecture > Art forms, treatments & subjects > Prints & printmaking > General Books > Business & Economics > Business & management > Management of specific areas > Production & quality control management Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Circuits & components Books > Arts & Architecture > Art forms, treatments & subjects > Art treatments & subjects > Art techniques & materials > Art techniques & principles
LSN:	0-8412-2848-5
Barcode:	9780841228481

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