Updated and expanded! Reviews the theory, materials, and processes
that are used in the lithographic process. Opens with a brief
historical introduction to the advances in microlithography.
Discusses four major topics: the physics of the lithographic
process, organic resist materials, resist processing, and plasma
etching. Designed as a tutorial for researchers with no experience
in the field, as well as those experienced in microlithography.
Will also prove invaluable to those already involved in
microlithography. Includes numerous references for more detailed
reading on specific aspects of microlithography.
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