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Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors
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Thin Films On Silicon: Electronic And Photonic Applications (Hardcover)
Loot Price: R5,171
Discovery Miles 51 710
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Thin Films On Silicon: Electronic And Photonic Applications (Hardcover)
Series: Materials and Energy, 8
Expected to ship within 12 - 17 working days
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This volume provides a broad overview of the fundamental materials
science of thin films that use silicon as an active substrate or
passive template, with an emphasis on opportunities and challenges
for practical applications in electronics and photonics. It covers
three materials classes on silicon: Semiconductors such as undoped
and doped Si and SiGe, SiC, GaN, and III-V arsenides and
phosphides; dielectrics including silicon nitride and high-k,
low-k, and electro-optically active oxides; and metals, in
particular silicide alloys. The impact of film growth and
integration on physical, electrical, and optical properties, and
ultimately device performance, is highlighted.
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