The unique compendium presents special principles and techniques of
spectroscopic measurements that are used in semiconductor
manufacturing.Since industrial applications of spectroscopy are
significantly different from those traditionally used in scientific
laboratories, the design concepts and characteristics of industrial
spectroscopic devices may vary significantly from conventional
systems. These peculiarities are thus succinctly summarized in this
volume for a wide audience of students, engineers, and scientific
workers.Exceptionally well-illustrated with practical solutions in
detail, this useful reference text will open new horizons in new
research areas.
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