This unique monograph discusses all aspects of the design and operation of ultra-high vacuum pumps (EUVP). The adsorption-diffusion model of interaction of gas molecules with metal getters is presented, together with the getter films sorption characteristics. A mathematical model of molecular transfer in electrophysical pumps and the principles and criteria of their energy and structural-geometrical optimization are proposed. The physical processes in the pumps are analyzed during the pumping out of both active and inert gases. Also presented are the generic and specific pump parameters and the methods for calculating their main characteristics.