This unique monograph discusses all aspects of the design and
operation of ultra-high vacuum pumps (EUVP). The
adsorption-diffusion model of interaction of gas molecules with
metal getters is presented, together with the getter films sorption
characteristics. A mathematical model of molecular transfer in
electrophysical pumps and the principles and criteria of their
energy and structural-geometrical optimization are proposed. The
physical processes in the pumps are analyzed during the pumping out
of both active and inert gases. Also presented are the generic and
specific pump parameters and the methods for calculating their main
characteristics.
General
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