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Optical MEMS are micro-electromechanical systems merged with
micro-optics. They allow sensing or manipulating optical signals on
a very small size scale using integrated mechanical, optical, and
electrical systems and hold great promise specifically in
biomedical applications, among others. This book describes the
current state of optical MEMS in chemical and biomedical analysis
with topics covered including fabrication and manufacturing
technology for optical MEMS; electrothermally-actuated MEMS
scanning micromirrors and their applications in endoscopic optical
coherence tomography imaging; electrowetting-based microoptics;
microcameras; biologically inspired optical surfaces for
miniaturized optical systems; tuning nanophotonic cavities with
nanoelectromechanical systems; quantum dot nanophotonics -
micropatterned excitation, microarray imaging and hyperspectral
microscopy; photothermal microfluidics; optical manipulation for
biomedical applications; polymer-based optofluidic lenses; and
nanostructured aluminum oxide-based optical biosensing and imaging.
Bringing together topics representing the most exciting progress
made and current trends in the field in recent years, this book is
an essential addition to the bookshelves of researchers and
advanced students working on developing, manufacturing or applying
optical MEMS and other sensors.
Due to the development of microscale fabrication methods,
microlenses are being used more and more in many unique
applications, such as artificial implementations of compound eyes,
optical communications, and labs-on-chips. Liquid microlenses, in
particular, represent an important and growing research area yet
there are no books devoted to this topic that summarize the
research to date. Rectifying this deficiency, Microlenses:
Properties, Fabrication and Liquid Lenses examines the recent
progress in the emerging field of liquid-based microlenses. After
describing how certain problems in optics can be solved by liquid
microlenses, the book introduces the physics and fabrication
methods involved in microlenses. It also details the facility and
equipment requirements for general fabrication methods. The authors
then present examples of various microlenses with non-tunable and
tunable focal lengths based on different mechanisms, including:
Non-tunable microlenses: Ge/SiO2 core/shell nanolenses, glass
lenses made by isotropic etching, self-assembled lenses and lens
arrays, lenses fabricated by direct photo-induced polymerization,
lenses formed by thermally reflowing photoresist, lenses formed
from inkjet printing, arrays fabricated through molding processes,
and injection-molded plastic lenses Electrically tuned microlenses:
liquid crystal-based lenses and liquid lenses driven by
electrostatic forces, dielectrophoretic forces, electrowetting, and
electrochemical reactions Mechanically tunable microlenses:
thin-membrane lenses with varying apertures, pressures, and surface
shapes; swellable hydrogel lenses; liquid-liquid interface lenses
actuated by environmentally stimuli-responsive hydrogels; and
oscillating lens arrays driven by sound waves Horizontal
microlenses: two-dimensional polymer lenses, tunable and movable
liquid droplets as lenses, hydrodynamically tuned cylindrical
lenses, liquid core and liquid cladding lenses, air-liquid
interface lenses, and tunable liquid gradient refractive index
lenses The book concludes by summarizing the importance of
microlenses, shedding light on future microlens work, and exploring
related challenges, such as the packaging of systems, effects of
gravity, evaporation of liquids, aberrations, and integration with
other optical components.
Due to the development of microscale fabrication methods,
microlenses are being used more and more in many unique
applications, such as artificial implementations of compound eyes,
optical communications, and labs-on-chips. Liquid microlenses, in
particular, represent an important and growing research area yet
there are no books devoted to this topic that summarize the
research to date. Rectifying this deficiency, Microlenses:
Properties, Fabrication and Liquid Lenses examines the recent
progress in the emerging field of liquid-based microlenses. After
describing how certain problems in optics can be solved by liquid
microlenses, the book introduces the physics and fabrication
methods involved in microlenses. It also details the facility and
equipment requirements for general fabrication methods. The authors
then present examples of various microlenses with non-tunable and
tunable focal lengths based on different mechanisms, including:
Non-tunable microlenses: Ge/SiO2 core/shell nanolenses, glass
lenses made by isotropic etching, self-assembled lenses and lens
arrays, lenses fabricated by direct photo-induced polymerization,
lenses formed by thermally reflowing photoresist, lenses formed
from inkjet printing, arrays fabricated through molding processes,
and injection-molded plastic lenses Electrically tuned microlenses:
liquid crystal-based lenses and liquid lenses driven by
electrostatic forces, dielectrophoretic forces, electrowetting, and
electrochemical reactions Mechanically tunable microlenses:
thin-membrane lenses with varying apertures, pressures, and surface
shapes; swellable hydrogel lenses; liquid-liquid interface lenses
actuated by environmentally stimuli-responsive hydrogels; and
oscillating lens arrays driven by sound waves Horizontal
microlenses: two-dimensional polymer lenses, tunable and movable
liquid droplets as lenses, hydrodynamically tuned cylindrical
lenses, liquid core and liquid cladding lenses, air-liquid
interface lenses, and tunable liquid gradient refractive index
lenses The book concludes by summarizing the importance of
microlenses, shedding light on future microlens work, and exploring
related challenges, such as the packaging of systems, effects of
gravity, evaporation of liquids, aberrations, and integration with
other optical components.
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