Optical MEMS are micro-electromechanical systems merged with
micro-optics. They allow sensing or manipulating optical signals on
a very small size scale using integrated mechanical, optical, and
electrical systems and hold great promise specifically in
biomedical applications, among others. This book describes the
current state of optical MEMS in chemical and biomedical analysis
with topics covered including fabrication and manufacturing
technology for optical MEMS; electrothermally-actuated MEMS
scanning micromirrors and their applications in endoscopic optical
coherence tomography imaging; electrowetting-based microoptics;
microcameras; biologically inspired optical surfaces for
miniaturized optical systems; tuning nanophotonic cavities with
nanoelectromechanical systems; quantum dot nanophotonics -
micropatterned excitation, microarray imaging and hyperspectral
microscopy; photothermal microfluidics; optical manipulation for
biomedical applications; polymer-based optofluidic lenses; and
nanostructured aluminum oxide-based optical biosensing and imaging.
Bringing together topics representing the most exciting progress
made and current trends in the field in recent years, this book is
an essential addition to the bookshelves of researchers and
advanced students working on developing, manufacturing or applying
optical MEMS and other sensors.
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