Signal Measurement and Estimation Techniques for Micro and
Nanotechnology discusses micro, nano and robotic cells and gives a
state-of-the-art presentation of the different techniques and
solutions to measure and estimate signals at the micro and nano
scale. New technologies and applications such as micromanipulation
(artificial components, biological objects), micro-assembly (MEMS,
MOEMS, NEMS) and material and surface force characterization are
covered. The importance of sensing at the micro and nano scale is
presented as a key issue in control systems, as well as for
understanding the physical phenomena of these systems. The book
also:
Explains issues that make signal measurement and estimation
techniques difficult at the micro-nano-scale and offers
solutions
Discusses automated micro-assembly, and control of micro-nano
roboticdevices
Presents and links signal measurement and estimation techniques
for micro-nano scale systems with microfabrication methods, sensors
integration and control schemes
Signal Measurement and Estimation Techniques for Micro and
Nanotechnology is a must-read for researchers and engineers working
in MEMS and control systems."
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