In this book the Russian expertise in the field of the design of
precise vacuum mechanics is summarized. A wide range of physical
applications of mechanism design in electronic, optical-electronic,
chemical, and aerospace industries is presented in a comprehensible
way.
Topics treated include the method of microparticles flow
regulation and its determination in vacuum equipment and mechanisms
of electronics; precise mechanisms of nanoscale precision based on
magnetic and electric rheology; precise harmonic rotary and
not-coaxial nut-screw linear motion vacuum feedthroughs with
technical parameters considered the best in the world; elastically
deformed vacuum motion feedthroughs without friction couples usage;
the computer system of vacuum mechanisms failure predicting.
This English edition incorporates a number of features which
should improve its usefulness as a textbook without changing the
basic organization or the general philosophy of presentation of the
subject matter of the original Russian work.
Experience at the Bauman Moscow State Technical University and
other schools shows that the book will be useful to engineering
students who wish to prepare for more advanced studies and
applications of vacuum science, technology and its
applications.
General
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