Micromachines as Tools for Nanotechnology (Hardcover, 2003 ed.)

This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology.

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Series:	Microtechnology and MEMS
Release date:	July 2003
First published:	2003
Editors:	Hiroyuki Fujita
Dimensions:	235 x 155 x 14mm (L x W x T)
Format:	Hardcover
Pages:	211
Edition:	2003 ed.
ISBN-13:	978-3-540-00856-9
Categories:	Books > Professional & Technical > Technology: general issues > Nanotechnology
LSN:	3-540-00856-X
Barcode:	9783540008569

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