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Books > Professional & Technical > Mechanical engineering & materials > Materials science > Testing of materials
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Ion Implantation Range and Energy Deposition Distributions - Volume 2: Low Incident Ion Energies (Paperback, 1975 ed.)
Loot Price: R2,966
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Ion Implantation Range and Energy Deposition Distributions - Volume 2: Low Incident Ion Energies (Paperback, 1975 ed.)
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The present level of understanding of ion implantation is
sufficient that implantation Ls being used not only as a tool in
various fields of research, but also as an industrial )rocess. In
these applications one uses either the implanted ions, or their
energy, to nodify some properties of the target substance, and is
therefore concerned with the spatial listribution of the ions or of
their energy. Following the pioneering work of Bohr [1), ~indhard
and his collaborators have evolved a general description of the
behaviour of swift Lons slowing down in amorphous targets [2,3,4),
a description which has been the basis of nuch other work in the
field. Various approximate calculations have been based on this
:heory, but it has not always been clear whether any disagreement
between experiment and :heory is real or can be attributed to
deficiencies in calculation. It is the purpose of :his volume to
present the results of the Lindhard theory, calculated in an exact
manner, :o serve as a guide to the users of implantation, as a
tabulation of theoretical results for experimentalists to compare
with, and as a statement of the theoretical results either ~s a
standard for comparison for approximate calculations or as a
starting point for a more ietailed theory. Results are presented in
tables and in graphs, the graphs being intended to display the
qualitative features so as to illustrate the competition of the
various phy sical processes determining the spatial distribution of
the collision cascade.
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