Advanced Micro & Nanosystems (AMN) provides cutting-edge
reviews and detailed case studies by top authors from science and
industry, covering technologies, devices and advanced systems from
the micro and nano worlds, which together have an immense
innovative application potential that opens up with control of
shape and function from the atomic level right up to the visible
world without any technological gaps.
In this topical volume, authors from leading industrial players
and research institutions present a concise and didactical
introduction to Micro Process Engineering, the combination of
microtechnology and process engineering into a most promising and
powerful tool for revolutionizing chemical processes and industrial
mass production of bulk materials, fine chemicals, pharmaceuticals
and many other products.
The book takes the readers from the fundamentals of engineering
methods, transport processes, and fluid dynamics to device
conception, simulation and modelling, control interfaces and issues
of modularity and compatibility. Fabrication strategies and
techniques are examined next, focused on the fabrication of
suitable microcomponents from various materials such as metals,
polymers, silicon, ceramics and glass. The book concludes with
actual applications and operational aspects of micro process
systems, giving broad coverage to industrial efforts in America,
Europe and Asia as well as laboratory equipment and education.
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