Society is approaching and advancing nano- and microtechnology from
various angles of science and engineering. The need for further
fundamental, applied, and experimental research is matched by the
demand for quality references that capture the multidisciplinary
and multifaceted nature of the science.
Presenting cutting-edge information that is applicable to many
fields, Nano- and Micro-Electromechanical Systems: Fundamentals of
Nano and Microengineering, Second Edition builds the theoretical
foundation for understanding, modeling, controlling, simulating,
and designing nano- and microsystems. The book focuses on the
fundamentals of nano- and microengineering and nano- and
microtechnology. It emphasizes the multidisciplinary principles of
NEMS and MEMS and practical applications of the basic theory in
engineering practice and technology development.
Significantly revised to reflect both fundamental and
technological aspects, this second edition introduces the concepts,
methods, techniques, and technologies needed to solve a wide
variety of problems related to high-performance nano- and
microsystems. The book is written in a textbook style and now
includes homework problems, examples, and reference lists in every
chapter, as well as a separate solutions manual. It is designed to
satisfy the growing demands of undergraduate and graduate students,
researchers, and professionals in the fields of nano- and
microengineering, and to enable them to contribute to the
nanotechnology revolution.
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