"Chemistry and Lithography" provides a comprehensive treatment of
the chemical phenomena in lithography in a manner that is
accessible to a wide readership. The book presents topics on the
optical and charged particle physics practiced in lithography, with
a broader view of how the marriage between chemistry and optics has
made possible the print and electronic revolutions of the digital
age. The related aspects of lithography are thematically presented
to convey a unified view of the developments in the field over
time, from the very first recorded reflections on the nature of
matter to the latest developments at the frontiers of lithography
science and technology.
Part I presents several important chemical and physical
principles involved in the invention and evolution of lithography.
Part II covers the processes for the synthesis, manufacture, usage,
and handling of lithographic chemicals and materials. Part III
investigates several important chemical and physical principles
involved in the practice of lithography. "Chemistry and
Lithography" is a useful reference for anyone working in the
semiconductor industry.
General
Is the information for this product incomplete, wrong or inappropriate?
Let us know about it.
Does this product have an incorrect or missing image?
Send us a new image.
Is this product missing categories?
Add more categories.
Review This Product
No reviews yet - be the first to create one!