Microstereolithography - & other Fabrication Techniques for 3D MEMS (Hardcover)

The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communication is booming. Focusing on microstereolithography, this timely work provides insight into state-of-the-art microfabrication techniques for 3D microstructures, microdevices and MEMS.

• A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques
• Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units.
• Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding.
• Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers

Microelectronics engineers will profit form this detailed overview of current technologies. Material technologists and physicists working in industrial and academic research and development will also find this a valuable reference source.

General

Imprint:	John Wiley & Sons
Country of origin:	United States
Release date:	2001
First published:	March 2001
Authors:	V.K. Varadan
Dimensions:	235 x 165 x 23mm (L x W x T)
Format:	Hardcover
Pages:	274
ISBN-13:	978-0-471-52185-3
Categories:	Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > General Promotions
LSN:	0-471-52185-X
Barcode:	9780471521853

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