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This book presents the fundamentals of novel gate dielectrics that
are being introduced into semiconductor manufacturing to ensure the
continuous scaling of CMOS devices. As this is a rapidly evolving
field of research we choose to focus on the materials that
determine the performance of device applications. Most of these
materials are transition metal oxides. Ironically, the d-orbitals
responsible for the high dielectric constant cause severe
integration difficulties, thus intrinsically limiting high-k
dielectrics. Though new in the electronics industry many of these
materials are well-known in the field of ceramics, and we describe
this unique connection. The complexity of the structure-property
relations in TM oxides requires the use of state-of-the-art
first-principles calculations. Several chapters give a detailed
description of the modern theory of polarization, and
heterojunction band discontinuity within the framework of the
density functional theory. Experimental methods include oxide melt
solution calorimetry and differential scanning calorimetry, Raman
scattering and other optical characterization techniques,
transmission electron microscopy, and X-ray photoelectron
spectroscopy.
Many of the problems encountered in the world of CMOS are also
relevant for other semiconductors such as GaAs. A comprehensive
review of recent developments in this field is thus also given. The
book will be of interest to those actively engaged in gate
dielectric research, and to graduate students in Materials Science,
Materials Physics, Materials Chemistry, and Electrical
Engineering.
Today large numbers of geoscientists apply thermodynamic theory to
solu tions of a variety of problems in earth and planetary
sciences. For most problems in chemistry, the application of
thermodynamics is direct and rewarding. Geoscientists, however,
deal with complex inorganic and organic substances. The
complexities in the nature of mineralogical substances arise due to
their involved crystal structure and multicomponental character. As
a result, thermochemical solutions of many
geological-planetological problems should be attempted only with a
clear understanding of the crystal-chemical and thermochemical
character of each mineral. The subject of physical geochemistry
deals with the elucidation and application of physico-chemical
principles to geosciences. Thermodynamics of mineral phases and
crystalline solutions form an integral part of it. Developments in
mineralogic thermody namics in recent years have been very
encouraging, but do not easily reach many geoscientists interested
mainly in applications. This series is to provide geoscientists and
planetary scientists with current information on the develop ments
in thermodynamics of mineral systems, and also provide the active
researcher in this rapidly developing field with a forum through
which he can popularize the important conclusions of his work. In
the first several volumes, we plan to publish original
contributions (with an abundant supply of back ground material for
the uninitiated reader) and thoughtful reviews from a number of
researchers on mineralogic thermodynamics, on the application of
thermochemistry to planetary phase equilibria (including
meteorites), and on kinetics of geochemical reactions."
According to Bernie Meyerson, IBM's chief technology of?cer, the
traditional sc- ing of semiconductor manufacturing processes died
somewhere between the 1- and 90-nanometer nodes. One of the prime
reasons is the low dielectric constant of SiO - thechoice
dielectricof all modern electronics. This book presents materials 2
fundamentals of the novel gate dielectrics that are being
introduced into semic- ductor manufacturing to ensure the Moore's
law scaling of CMOS devices. This is a very rapidly evolving?eld of
research and we try to focus on the basicundersta- ing of
structure, thermodynamics, and electronic properties of these
materials that determine their performance in the device
applications. Thevolume was conceivedin 2001 afteraSymposium on
Alternative Gate - electrics we had at the American Physical
Society March Meeting in Seattle, upon the suggestion of the Kluwer
editor Sabine Freisem. After several discussions we decided that
such a bookindeed would be useful as long as we could focus on the
fundamental side of the problem and keep the level of the
discussion accessible to graduate students andavariety of
professionals from different ?elds. The problem of?nding a
replacement for SiO asa gate dielectric bringstogether inaunique
way 2 many fundamental disciplines. At the same time this problem
is truly applied and practical. It looked unlikelythat the perfect
new material would be foundfast; rather there would be a series of
evolving candidate materialsand approaches.
With an approach that stresses the fundamental solid state
behaviour of minerals, and with emphasis on both theory and
experiment, this text surveys the physics and chemistry of earth
materials. It starts with a systematic tour of crystal chemistry of
both simple and complex structures (with completely new structural
drawings) and discusses how structural and thermodynamic
information is obtained experimentally. The quantitative concepts
of chemical bonding band theory, molecular orbit and ionic models
are reviewed. The book goes on to discuss physical properties and
to relate microscopic features to macroscopic thermodynamic
behaviour. The book then discusses high pressure phase transitions,
amorphous materials and solid state reactions, and concludes with a
look at the interface between mineral physics and materials
science. Highly illustrated throughout, this book is designed to
fill the gap between undergraduate texts and specialized review
volumes, for students in earth sciences and materials science.
Resonance phenomena have been the topic of a number of reviews, and
separate questions have been elucidated in some monographs. But the
absence of a bal anced integral account of the current status of
the problem hinders the orientation in this area. The present book
is an attempt to fill this gap. The results of investigations of
the resonance scattering of electrons by atoms and ions are
considered. We compare different theoretical methods of descrip
tion of resonance phenomena, for example, the close-coupling
method, R-matrix method, and diagonalization method. Special
attention is paid to the analysis of the accuracy of the
theoretical calculations and experimental data. Besides the
conventional analytical solutions of a multiparticle problem, more
recently developed methods, made possible by high speed computers,
are discussed in detail. Several computer programs are scrutinized.
This book is intended for physicists engaged in the problems of
electronic and atomic collisions, and related areas such as plasma
and laser physics. It should be of interest to university students
and postgraduates."
With an approach that stresses the fundamental solid state
behaviour of minerals, and with emphasis on both theory and
experiment, this text surveys the physics and chemistry of earth
materials. It starts with a systematic tour of crystal chemistry of
both simple and complex structures (with completely new structural
drawings) and discusses how structural and thermodynamic
information is obtained experimentally. The quantitative concepts
of chemical bonding band theory, molecular orbit and ionic models
are reviewed. The book goes on to discuss physical properties and
to relate microscopic features to macroscopic thermodynamic
behaviour. The book then discusses high pressure phase transitions,
amorphous materials and solid state reactions, and concludes with a
look at the interface between mineral physics and materials
science. Highly illustrated throughout, this book is designed to
fill the gap between undergraduate texts and specialized review
volumes, for students in earth sciences and materials science.
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