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Integrated circuits are expected to increase their speed and power
dramatically and rapidly. New packaging techniques are required if
the devices are to remain within cost and size constraints. The
present volume addresses new hermetic packaging, new materials for
thermal management and assembly, and new components that integrate
multiple functions (embedded substrates and component arrays),
while retaining previous high levels of reliability. The book
embraces many developments in fundamental materials science and
manufacturing processes of discrete components, as well as
developments in high speed, high integration packaging and more
complex embedded component technologies.
This is the first text to cover all aspects of solution processed
functional oxide thin-films. Chemical Solution Deposition (CSD)
comprises all solution based thin- film deposition techniques,
which involve chemical reactions of precursors during the formation
of the oxide films, i. e. sol-gel type routes, metallo-organic
decomposition routes, hybrid routes, etc. While the development of
sol-gel type processes for optical coatings on glass by silicon
dioxide and titanium dioxide dates from the mid-20th century, the
first CSD derived electronic oxide thin films, such as lead
zirconate titanate, were prepared in the 1980's. Since then CSD has
emerged as a highly flexible and cost-effective technique for the
fabrication of a very wide variety of functional oxide thin films.
Application areas include, for example, integrated dielectric
capacitors, ferroelectric random access memories, pyroelectric
infrared detectors, piezoelectric micro-electromechanical systems,
antireflective coatings, optical filters, conducting-, transparent
conducting-, and superconducting layers, luminescent coatings, gas
sensors, thin film solid-oxide fuel cells, and
photoelectrocatalytic solar cells. In the appendix detailed
"cooking recipes" for selected material systems are offered.
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