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Handbook of Silicon Semiconductor Metrology (Paperback) Loot Price: R2,233
Discovery Miles 22 330
Repayment Terms: R209 pm x 12*
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Handbook of Silicon Semiconductor Metrology (Paperback): Alain C. Diebold

Handbook of Silicon Semiconductor Metrology (Paperback)

Alain C. Diebold

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Loot Price R2,233 Discovery Miles 22 330 | Repayment Terms: R209 pm x 12*

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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

General

Imprint: Crc Press
Country of origin: United Kingdom
Release date: October 2019
First published: 2001
Editors: Alain C. Diebold
Dimensions: 254 x 178mm (L x W)
Format: Paperback
Pages: 896
ISBN-13: 978-0-367-39716-6
Categories: Books > Professional & Technical > Environmental engineering & technology > General
Books > Professional & Technical > Energy technology & engineering > Electrical engineering > General
Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Microwave technology
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LSN: 0-367-39716-1
Barcode: 9780367397166

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