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The Physics of Submicron Semiconductor Devices (Hardcover, 1988 ed.)
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The Physics of Submicron Semiconductor Devices (Hardcover, 1988 ed.)
Series: NATO Science Series B:, 180
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The papers contained in the volume represent lectures delivered as
a 1983 NATO ASI, held at Urbino, Italy. The lecture series was
designed to identify the key submicron and ultrasubmicron device
physics, transport, materials and contact issues. Nonequilibrium
transport, quantum transport, interfacial and size constraints
issues were also highlighted. The ASI was supported by NATO and the
European Research Office. H. L. Grubin D. K. Ferry C. Jacoboni v
CONTENTS MODELLING OF SUB-MICRON DEVICES..................
.......... 1 E. Constant BOLTZMANN TRANSPORT EQUATION... ... ......
.................... 33 K. Hess TRANSPORT AND MATERIAL
CONSIDERATIONS FOR SUBMICRON DEVICES. . .. . . . . .. . . . .. . ..
. .... ... .. . . . .. . . . .. . . . . . . . . . . 45 H. L. Grubin
EPITAXIAL GROWTH FOR SUB MICRON STRUCTURES.................. 179 C.
E. C. Wood INSULATOR/SEMICONDUCTOR
INTERFACES.......................... 195 C. W. Wilms en THEORY OF
THE ELECTRONIC STRUCTURE OF SEMICONDUCTOR SURFACES AND
INTERFACES......................................... 223 C. Calandra
DEEP LEVELS AT COMPOUND-SEMICONDUCTOR INTERFACES........... 253 W.
Monch ENSEMBLE MONTE CARLO TECHNIqUES.............................
289 C. Jacoboni NOISE AND DIFFUSION IN SUBMICRON
STRUCTURES................. 323 L. Reggiani SUPERLATTICES. . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 361 . .
. . . . . . . . . . K. Hess SUBMICRON LITHOGRAPHY 373 C. D. W.
Wilkinson and S. P. Beaumont QUANTUM EFFECTS IN DEVICE STRUCTURES
DUE TO SUBMICRON CONFINEMENT IN ONE DIMENSION....
....................... 401 B. D. McCombe vii viii CONTENTS PHYSICS
OF HETEROSTRUCTURES AND HETEROSTRUCTURE DEVICES..... 445 P. J.
Price CORRELATION EFFECTS IN SHORT TIME, NONS TAT I ONARY
TRANSPORT. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . 477 . . . . . . . . . . . . J. J. Niez DEVICE-DEVICE
INTERACTIONS............ ...................... 503 D. K. Ferry
QUANTUM TRANSPORT AND THE WIGNER FUNCTION................... 521 G.
J. Iafrate FAR INFRARED MEASUREMENTS OF VELOCITY OVERSHOOT AND HOT
ELECTRON DYNAMICS IN SEMICONDUCTOR DEVICES............. 577 S. J.
Allen, Jr.
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