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Mechanics of Microelectromechanical Systems (Paperback, 2005 ed.)
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Mechanics of Microelectromechanical Systems (Paperback, 2005 ed.)
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This book offers a comprehensive coverage to the mechanics of
microelectromechanical systems (MEMS), which are analyzed from a
mechanical engineer's viewpoint as devices that transform an input
form of energy, such as thermal, electrostatic, electromagnetic or
optical, into output mechanical motion (in the case of actuation)
or that can operate with the reversed functionality (as in sensors)
and convert an external stimulus, such as mechanical motion, into
(generally) electric energy. The impetus of this proposal stems
from the perception that such an approach might contribute to a
more solid understanding of the principles governing the mechanics
of MEMS, and would hopefully enhance the efficiency of modeling and
designing reliable and desirably-optimized microsystems. The work
represents an attempt at both extending and deepening the
mechanical-based approach to MEMS in the static domain by providing
simple, yet reliable tools that are applicable to micromechanism
design through current fabrication technologies. Lumped-parameter
stiffness and compliance properties of flexible components are
derived both analytically (as closed-form solutions) and as
simplified (engineering) formulas. Also studied are the principal
means of actuation/sensing and their integration into the overall
microsystem. Various examples of MEMS are studied in order to
better illustrate the presentation of the different modeling
principles and algorithms. Through its objective, approach and
scope, this book offers a novel and systematic insight into the
MEMS domain and complements existing work in the literature
addressing part of the material developed herein.
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