Phenomena associated with the adhesion interaction of surfaces have
been a critical aspect of micro- and nanosystem development and
performance since the first MicroElectroMechanicalSystems(MEMS)
were fabricated. These phenomena are ubiquitous in nature and are
present in all systems, however MEMS devices are particularly
sensitive to their effects owing to their small size and limited
actuation force that can be generated. Extension of MEMS technology
concepts to the nanoscale and development of
NanoElectroMechanicalSystems(NEMS) will result in systems even more
strongly influenced by surface forces. The book is divided into
five parts as follows: Part 1: Understanding Through Continuum
Theory; Part 2: Computer Simulation of Interfaces; Part 3: Adhesion
and Friction Measurements; Part 4: Adhesion in Practical
Applications; and Part 5: Adhesion Mitigation Strategies. This
compilation constitutes the first book on this extremely important
topic in the burgeoning field of MEMS/NEMS. It is obvious from the
topics covered in this book that bountiful information is contained
here covering understanding of surface forces and adhesion as well
as novel ways to mitigate adhesion in MEMS/NEMS. This book should
be of great interest to anyone engaged in the wonderful and
fascinating field of MEMS/NEMS, as it captures the current R&D
activity.
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