Photonic MEMS devices represent the next major breakthrough in the
silicon revolution. While many quality resources exist on the optic
and photonic aspect of device physics, today's researchers are in
need of a reference that goes beyond to include all aspects of
engineering innovation.
An extension on traditional design and analysis, Photonic MEMS
Devices: "Design, Fabrication, and Control "describes a broad range
of optical and photonic devices, from MEMS optical switches and
bandgap crystal switches to optical variable attenuators (VOA) and
injection locked tunable lasers. It deals rigorously with all these
technologies at a fundamental level, systematically introducing
critical nomenclature. Each chapter also provides analysis
techniques, equations, and experimental results. The book focuses
not only on traditional design analysis, but also provides
extensive background on realistic simulation and fabrication
processes.
With a clear attention to experimental relevance, this book
provides the fundamental knowledge needed to take the next-step in
integrating photonic MEMS devices into commercial products and
technology.
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