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Integration of Functional Oxides with Semiconductors (Hardcover, 2014 ed.)
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Integration of Functional Oxides with Semiconductors (Hardcover, 2014 ed.)
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This book describes the basic physical principles of the
oxide/semiconductor epitaxy and offers a view of the current state
of the field. It shows how this technology enables large-scale
integration of oxide electronic and photonic devices and describes
possible hybrid semiconductor/oxide systems. The book incorporates
both theoretical and experimental advances to explore the
heteroepitaxy of tuned functional oxides and semiconductors to
identify material, device and characterization challenges and to
present the incredible potential in the realization of
multifunctional devices and monolithic integration of materials and
devices. Intended for a multidisciplined audience, Integration of
Functional Oxides with Semiconductors describes processing
techniques that enable atomic-level control of stoichiometry and
structure and reviews characterization techniques for films,
interfaces and device performance parameters. Fundamental
challenges involved in joining covalent and ionic systems, chemical
interactions at interfaces, multi-element materials that are
sensitive to atomic-level compositional and structural changes are
discussed in the context of the latest literature. Magnetic,
ferroelectric and piezoelectric materials and the coupling between
them will also be discussed. GaN, SiC, Si, GaAs and Ge
semiconductors are covered within the context of optimizing
next-generation device performance for monolithic device
processing.
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