Covering the complete design cycle of nanopositioning systems,
this is the first comprehensive text on the topic. The book first
introduces concepts associated with nanopositioning stages and
outlines their application in such tasks as scanning probe
microscopy, nanofabrication, data storage, cell surgery and
precision optics. Piezoelectric transducers, employed ubiquitously
in nanopositioning applications are then discussed in detail
including practical considerations and constraints on transducer
response. The reader is then given an overview of the types of
nanopositioner before the text turns to the in-depth coverage of
mechanical design including flexures, materials, manufacturing
techniques, and electronics. This process is illustrated by the
example of a high-speed serial-kinematic nanopositioner. Position
sensors are then catalogued and described and the text then focuses
on control.
Several forms of control are treated: shunt control, feedback
control, force feedback control and feedforward control (including
an appreciation of iterative learning control). Performance issues
are given importance as are problems limiting that performance such
as hysteresis and noise which arise in the treatment of control and
are then given chapter-length attention in their own right. The
reader also learns about cost functions and other issues involved
in command shaping, charge drives and electrical considerations.
All concepts are demonstrated experimentally including by direct
application to atomic force microscope imaging.
Design, Modeling and Control of Nanopositioning Systems will be
of interest to researchers in mechatronics generally and in control
applied to atomic force microscopy and other nanopositioning
applications. Microscope developers and mechanical designers of
nanopositioning devices will find the text essential reading.
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