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Handbook of Ion Sources (Hardcover)
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Handbook of Ion Sources (Hardcover)
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The Handbook of Ion Sources delivers the data needed for daily work
with ion sources. It also gives information for the selection of a
suitable ion source and ion production method for a specific
application.
The Handbook concentrates on practical aspects and introduces the
principle function of ion sources. The basic plasma parameters are
defined and discussed. The working principles of various ion
sources are explained, and examples of each type of ion source are
presented with their operational data. Tables of ion current for
various elements and charge states summarize the performance of
different ion sources.
The problems related to the production of ions of non-gaseous
elements are detailed, and data on useful materials for evaporation
and ion source construction are summarized. Additional chapters are
dedicated to extraction and beam formation, ion beam diagnosis, ion
source electronics, and computer codes for extraction,
acceleration, and beam transport. Emittance and brilliance are
described and space charge effects and neutralization discussed.
Various methods for the measurement of current, profile, emittance,
and time structure are presented and compared. Intensity limits for
these methods are provided for different ion energies.
Typical problems related to the operation of ion source plasmas are
discussed and practical examples of circuits are given. The
influence of high voltage on ion source electronics and
possibilities for circuit protection are covered. The generation of
microwaves and various microwave equipment are described and
special problems related to microwave operation are
summarized.
The Handbook of Ion Sources is a valuable reference on the subject,
of benefit to practitioners and graduate students interested in
accelerators, ion implantation, and ion beam techniques.
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