Metal Induced Crystallization and Polysilicon Thin Film Transistors (Paperback)

Nowadays,active-matrix addressing using a-Si TFTs is dominating in the flat panel display markets. However, low temperature polysilicon has been proposed and considered to be a promising alternative technology. Metal induced crystallization (MIe is one of the methods to obtain high quality polysilicon films at low temperatures. A few technologies are presented in this monograph, which improve the quality of MIC polysilicon film and hence the performance of TFTs built on. Amelioration of MIC processes has been made to produce high performance polysilicon TFTs using solution based MIC (SMIe and defined-grain MIC (DG-MIe methods. Novel post-annealing technologies are also introduced to reduce the micro-defects in MIC polysilicon film and hence to achieve better performance. These technologies include YAG laser post-annealing and flash lamp post-annealing. Particularly, it is the first time to report the application of flash lamp annealing technology in the fabrication of low temperature polysilicon and TFTs.

General

Imprint:	VDM Verlag
Country of origin:	Germany
Release date:	May 2009
First published:	May 2009
Authors:	Bo Zhang
Dimensions:	229 x 152 x 5mm (L x W x T)
Format:	Paperback - Trade
Pages:	84
ISBN-13:	978-3-639-15828-1
Categories:	Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > General
LSN:	3-639-15828-8
Barcode:	9783639158281

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