This "Third Edition" updates a landmark text with the latest
findings
"The Third Edition" of the internationally lauded "Semiconductor
Material and Device Characterization" brings the text fully
up-to-date with the latest developments in the field and includes
new pedagogical tools to assist readers. Not only does the "Third
Edition" set forth all the latest measurement techniques, but it
also examines new interpretations and new applications of existing
techniques.
"Semiconductor Material and Device Characterization" remains the
sole text dedicated to characterization techniques for measuring
semiconductor materials and devices. Coverage includes the full
range of electrical and optical characterization methods, including
the more specialized chemical and physical techniques. Readers
familiar with the previous two editions will discover a thoroughly
revised and updated "Third Edition," including: Updated and revised
figures and examples reflecting the most current data and
information260 new references offering access to the latest
research and discussions in specialized topicsNew problems and
review questions at the end of each chapter to test readers'
understanding of the material
In addition, readers will find fully updated and revised
sections in each chapter.
Plus, two new chapters have been added: Charge-Based and Probe
Characterization introduces charge-based measurement and Kelvin
probes. This chapter also examines probe-based measurements,
including scanning capacitance, scanning Kelvin force, scanning
spreading resistance, and ballistic electron emission
microscopy.Reliability and Failure Analysis examines failure times
and distribution functions, and discusses electromigration, hot
carriers, gate oxide integrity, negative bias temperature
instability, stress-induced leakage current, and electrostatic
discharge.
Written by an internationally recognized authority in the field,
"Semiconductor Material and Device Characterization" remains
essential reading for graduate students as well as for
professionals working in the field of semiconductor devices and
materials.
An Instructor's Manual presenting detailed solutions to all the
problems in the book is available from the Wiley editorial
department.
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