A NATO Advanced Research Workshop (ARW) entitled "Advanced
Materials and Technologies for Micro/Nano Devices, Sensors and
Actuators" was held in St. Petersburg, Russia, from June 29 to July
2, 2009. The main goal of the Workshop was to examine (at a
fundamental level) the very complex scientific issues that pertain
to the use of micro- and nano-electromechanical systems (MEMS and
NEMS), devices and technologies in next generation commercial and
defen- related applications. Micro- and nano-electromechanical
systems represent rather broad and diverse technological areas,
such as optical systems (micromirrors, waveguides, optical sensors,
integrated subsystems), life sciences and lab equipment
(micropumps, membranes, lab-on-chip, membranes, microfluidics),
sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors
integrated with electronics) and RF applications for signal
transmission (variable capacitors, tunable filters and antennas,
switches, resonators). From a scientific viewpoint, this is a very
multi-disciplinary field, including micro- and nano-mechanics (such
as stresses in structural materials), electronic effects (e. g.
charge transfer), general electrostatics, materials science,
surface chemistry, interface science, (nano)tribology, and optics.
It is obvious that in order to overcome the problems surrounding
next-generation MEMS/NEMS devices and applications it is necessary
to tackle them from different angles: theoreticians need to speak
with mechanical engineers, and device engineers and modelers to
listen to surface physicists. It was therefore one of the main
objectives of the workshop to bring together a multidisciplinary
team of distinguished researchers.
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