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Books > Professional & Technical > Mechanical engineering & materials > Production engineering

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Micro and Nano Fabrication - Tools and Processes (Paperback, Softcover reprint of the original 1st ed. 2015) Loot Price: R2,898

Discovery Miles 28 980

Repayment Terms: R272 pm x 12*

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Micro and Nano Fabrication - Tools and Processes (Paperback, Softcover reprint of the original 1st ed. 2015): Hans H. Gatzen,...

Micro and Nano Fabrication - Tools and Processes (Paperback, Softcover reprint of the original 1st ed. 2015)

Hans H. Gatzen, Volker Saile, JÃ¼rg Leuthold

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Loot Price R2,898 Discovery Miles 28 980 | Repayment Terms: R272 pm x 12*

Expected to ship within 10 - 15 working days

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Release date:	October 2016
First published:	2015
Authors:	Hans H. Gatzen • Volker Saile • JÃ¼rg Leuthold
Dimensions:	235 x 155 x 28mm (L x W x T)
Format:	Paperback
Pages:	519
Edition:	Softcover reprint of the original 1st ed. 2015
ISBN-13:	978-3-662-50826-8
Categories:	Books > Professional & Technical > Mechanical engineering & materials > Production engineering > General Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture > General Promotions
LSN:	3-662-50826-5
Barcode:	9783662508268