Micro and Nano Fabrication - Tools and Processes (Paperback, Softcover reprint of the original 1st ed. 2015)

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Release date:	October 2016
First published:	2015
Authors:	Hans H. Gatzen • Volker Saile • Jürg Leuthold
Dimensions:	235 x 155 x 28mm (L x W x T)
Format:	Paperback
Pages:	519
Edition:	Softcover reprint of the original 1st ed. 2015
ISBN-13:	978-3-662-50826-8
Categories:	Books > Professional & Technical > Mechanical engineering & materials > Production engineering > General Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture > General
LSN:	3-662-50826-5
Barcode:	9783662508268

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