0
Your cart

Your cart is empty

Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors

Buy Now

Scanning Probe Lithography (Hardcover, 2001 ed.) Loot Price: R3,000
Discovery Miles 30 000
Scanning Probe Lithography (Hardcover, 2001 ed.): Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F Quate

Scanning Probe Lithography (Hardcover, 2001 ed.)

Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F Quate

Series: Microsystems, 7

 (sign in to rate)
Loot Price R3,000 Discovery Miles 30 000 | Repayment Terms: R281 pm x 12*

Bookmark and Share

Expected to ship within 10 - 15 working days

Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.

General

Imprint: Springer
Country of origin: Netherlands
Series: Microsystems, 7
Release date: 2001
First published: June 2001
Authors: Hyongsok T. Soh • Kathryn Wilder Guarini • Calvin F Quate
Dimensions: 235 x 155 x 14mm (L x W x T)
Format: Hardcover
Pages: 197
Edition: 2001 ed.
ISBN-13: 978-0-7923-7361-2
Categories: Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors
Promotions
LSN: 0-7923-7361-8
Barcode: 9780792373612

Is the information for this product incomplete, wrong or inappropriate? Let us know about it.

Does this product have an incorrect or missing image? Send us a new image.

Is this product missing categories? Add more categories.

Review This Product

No reviews yet - be the first to create one!

You might also like..

Two-Dimensional Semiconductors…
J. Li Hardcover R2,762 R2,241 Discovery Miles 22 410
Electric Power Conversion and…
Majid Nayeripour, Mahdi Mansouri Hardcover R3,334 Discovery Miles 33 340
Transistors!
Mark S. Lundstrom Paperback R1,591 Discovery Miles 15 910
Spectroscopic Techniques For…
Vladimir Protopopov Hardcover R3,077 Discovery Miles 30 770
Properties, Techniques, and Applications…
Subhash Chander, Nirmala Kumari Jangid Hardcover R5,004 Discovery Miles 50 040
Power System Stability
Kenneth Eloghene Okedu Hardcover R3,307 Discovery Miles 33 070
Power Distribution Network Design…
Istvan Novak Hardcover R2,143 Discovery Miles 21 430
Electric Machines for Smart Grids…
Adel El-Shahat Hardcover R3,381 Discovery Miles 33 810
Graphene and Its Derivatives - Synthesis…
Ishaq Ahmad, Fabian I. Ezema Hardcover R2,770 Discovery Miles 27 700
Solid State Electronic Devices, Global…
Ben Streetman, Sanjay Banerjee Paperback R2,257 Discovery Miles 22 570
Power System Harmonics - Analysis…
Ahmed Zobaa, Shady H.E Abdel Aleem, … Hardcover R2,767 Discovery Miles 27 670
Switched-Mode Power Supply Simulation…
Steven M. Sandler Hardcover R1,518 Discovery Miles 15 180

See more

Partners