Closes the gap between hardcore-theoretical and purely
experimental RF-MEMS books.
The book covers, from a practical viewpoint, the most critical
steps that have to be taken in order to develop novel RF-MEMS
device concepts. Prototypical RF-MEMS devices, both including
lumped components and complex networks, are presented at the
beginning of the book as reference examples, and these are then
discussed from different perspectives with regard to design,
simulation, packaging, testing, and post-fabrication modeling.
Theoretical concepts are introduced when necessary to complement
the practical hints given for all RF-MEMS development
stages.Provides researchers and engineers with invaluable practical
hints on how to develop novel RF-MEMS device conceptsCovers all
critical steps, dealing with design, simulation, optimization,
characterization and fabrication of MEMS for radio-frequency
applicationsAddresses frequently disregarded issues, explicitly
treating the hard to predict interplay between the
three-dimensional device structure and its electromagnetic
functionalityBridges theory and experiment, fundamental concepts
are introduced with the application in mind, and simulation results
are validated against experimental results
Appeals to the practice-oriented R&D reader: design and
simulation examples are based on widely known software packages
such as ANSYS and the hardware description language Verilog.
General
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