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Photomodulated Optical Reflectance - A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon (Paperback, 2012 ed.) Loot Price: R2,769
Discovery Miles 27 690
Repayment Terms: R259 pm x 12*
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Photomodulated Optical Reflectance - A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon (Paperback, 2012...

Photomodulated Optical Reflectance - A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon (Paperback, 2012 ed.)

Janusz Bogdanowicz

Series: Springer Theses

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Loot Price R2,769 Discovery Miles 27 690 | Repayment Terms: R259 pm x 12*

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One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

General

Imprint: Springer-Verlag
Country of origin: Germany
Series: Springer Theses
Release date: July 2014
First published: 2012
Authors: Janusz Bogdanowicz
Dimensions: 235 x 155 x 12mm (L x W x T)
Format: Paperback
Pages: 204
Edition: 2012 ed.
ISBN-13: 978-3-642-42686-5
Categories: Books > Science & Mathematics > Physics > Applied physics & special topics > General
Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors
LSN: 3-642-42686-7
Barcode: 9783642426865

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