MEMS - Design and Fabrication (Paperback)

Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.

General

Imprint:	Crc Press
Country of origin:	United Kingdom
Release date:	December 2019
First published:	2006
Editors:	Mohamed Gad-el-Hak
Dimensions:	254 x 178 x 29mm (L x W x T)
Format:	Paperback
Pages:	664
ISBN-13:	978-0-367-39163-8
Categories:	Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Environmental engineering & technology > General Books > Professional & Technical > Mechanical engineering & materials > Mechanical engineering > General Books > Professional & Technical > Energy technology & engineering > Electrical engineering > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > General
LSN:	0-367-39163-5
Barcode:	9780367391638

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