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Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors

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Plasma Processing of Semiconductors (Hardcover, 1997 ed.) Loot Price: R9,013
Discovery Miles 90 130
Repayment Terms: R845 pm x 12*
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Plasma Processing of Semiconductors (Hardcover, 1997 ed.): P.F. Williams

Plasma Processing of Semiconductors (Hardcover, 1997 ed.)

P.F. Williams

Series: NATO Science Series E:, 336

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Loot Price R9,013 Discovery Miles 90 130 | Repayment Terms: R845 pm x 12*

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Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

General

Imprint: Springer
Country of origin: Netherlands
Series: NATO Science Series E:, 336
Release date: May 1997
First published: 1997
Editors: P.F. Williams
Dimensions: 235 x 155 x 33mm (L x W x T)
Format: Hardcover
Pages: 613
Edition: 1997 ed.
ISBN-13: 978-0-7923-4567-1
Categories: Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors
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LSN: 0-7923-4567-3
Barcode: 9780792345671

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