Plasma Processing of Semiconductors (Hardcover, 1997 ed.)

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

General

Imprint:	Springer
Country of origin:	Netherlands
Series:	NATO Science Series E:, 336
Release date:	2001
First published:	1997
Editors:	P.F. Williams
Dimensions:	235 x 155 x 33mm (L x W x T)
Format:	Hardcover
Pages:	613
Edition:	1997 ed.
ISBN-13:	978-0-7923-4567-1
Categories:	Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors
LSN:	0-7923-4567-3
Barcode:	9780792345671

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