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Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors
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Microelectronic Materials and Processes (Paperback, Softcover reprint of the original 1st ed. 1989)
Loot Price: R13,551
Discovery Miles 135 510
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Microelectronic Materials and Processes (Paperback, Softcover reprint of the original 1st ed. 1989)
Series: NATO Science Series E:, 164
Expected to ship within 10 - 15 working days
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The primary thrust of very large scale integration (VLS ) is the
miniaturization of devices to increase packing density, achieve
higher speed, and consume lower power. The fabrication of
integrated circuits containing in excess of four million components
per chip with design rules in the submicron range has now been made
possible by the introduction of innovative circuit designs and the
development of new microelectronic materials and processes. This
book addresses the latter challenge by assessing the current status
of the science and technology associated with the production of
VLSI silicon circuits. It represents the cumulative effort of
experts from academia and industry who have come together to blend
their expertise into a tutorial overview and cohesive update of
this rapidly expanding field. A balance of fundamental and applied
contributions cover the basics of microelectronics materials and
process engineering. Subjects in materials science include silicon,
silicides, resists, dielectrics, and interconnect metallization.
Subjects in process engineering include crystal growth, epitaxy,
oxidation, thin film deposition, fine-line lithography, dry
etching, ion implantation, and diffusion. Other related topics such
as process simulation, defects phenomena, and diagnostic techniques
are also included. This book is the result of a NATO-sponsored
Advanced Study Institute (AS ) held in Castelvecchio Pascoli,
Italy. Invited speakers at this institute provided manuscripts
which were edited, updated, and integrated with other contributions
solicited from non-participants to this AS .
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