An Introduction to Surface-Micromachining provides for the first
time a unified view of surface-micromachining. Building up from the
basic building block of microfabrication techniques, to the general
surface-micromachining design, it will finish with the theory and
design of concrete components. An Introduction to
Surface-Micromachining connects the manufacturing process,
microscale phenomena, and design data to physical form and
function.
This book will be of interest to mechanical engineers looking to
scale down into micromachining and microelectronics designers
looking to move horizontally to micromachining.
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